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Thin Film Deposition System (Torr System)

Thin film deposition using following methods:

  • Sputter deposition (RF & DC)
  • Thermal Evaporation
  • Reactive sputter deposition
  • Rapid thermal oxidation

 

User Fees:

  • Free of cost for PANS investigators
  • $35/hr (independent operator)
  • $70 / hr (PANS operator)

Facility/Instrument Director:

Dr. Venkat Bommisetty

Contact Information:           

128D Solberg Hall, Box 2220
South Dakota State University
Brookings, SD 57007
Accessibility:

Solberg 014

Website:

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