Scanning Electron Microscope Electron microscopy of solid surfaces in high vacuum and variable pressure modes (up to 300 Pa). EDX and E-beam based nanolithography. |
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Scanning Electron Microscope Electron microscopy of solid surfaces in high vacuum and variable pressure modes (up to 300 Pa). EDX and E-beam based nanolithography. |
![]() |
User Fees:
|
Facility/Instrument Director:
|